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Semiconductor Material Deposition
Nitride MOCVD "Gandalf" Showerhead OVPD "Rudi"
gandalf.jpg RuDi_2011_mit_neuer_Glovebox_kleines_Bild.jpg
Device Processing
UV-lithography MA6 spin, coat and develop
MA6.jpg lithocoat.jpg
evaporation "Pfeiffox" RTA "Hotbird"
pfeiffer.jpg RTA.jpg
ICP "Uncle Etch" MW barrel etch
ICP barrel.jpg
PECVD "Petzi" Wafer dicer
PECVD.jpg Wafersaege_2011__b349.jpg
"lift-off & clean"
clean.jpg
Characterization
x-ray diffraction PL laboratory
X-Bert_2011_Var2_262.jpg pl.jpg
OLED Characterization Photoreflectance "Blindweasel"
oledmess.jpg blindweasel.jpg
on-wafer Hall contactless sheet resistance
hall.jpg mgage.jpg
AFM DC-IV-CV Prober
AFM.jpg dc.jpg
high T DC-IV-CV Pulsed IV
IVT.jpg pulsedIV.jpg

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